- 100,000+ start/stop cycles
- Self-stabilizing gas bearings
- Minimal wetted surfaces and materials
- No rotating seals
Dealing with argon, krypton, neon and xenon in semiconductor equipment machines often requires oil- and maintenance free pressure boosters. This rare gas recirculation can be achieved with exceptional efficiency using our high-speed turbo compressors. The compact and helium leak-tight design allows for compact machines saving clean room space. The compressors are also available in pressure-tight design, allowing for pressure levels higher than 100 bar absolute at the inlet of the compressor. The Closed-loop testing of the compressors is done in-house at Celeroton.